Linjiaojiao 写了: 2025年 3月 17日 21:07
DUV也能到10nm
何必这样ldp EUV来糊弄
我对这东西完全不懂,但是我问了chatgpt, 觉得它说得有道理。
Feature DUV LDP EUV
Resolution Requires multiple patterning Directly supports smaller nodes
Cost Lower initial cost, but high process complexity High initial cost, lower long-term complexity
Throughput Slower due to multi-patterning Faster due to lower dose
Yield More defects due to multiple steps Sensitive to resist quality, but fewer steps
Scalability Struggles at <5nm Suitable for advanced nodes (3nm, 2nm)