Linjiaojiao 写了: 2025年 3月 17日 21:07
DUV也能到10nm
何必这样ldp EUV来糊弄
 
我对这东西完全不懂,但是我问了chatgpt, 觉得它说得有道理。
Feature	DUV	LDP EUV
Resolution	Requires multiple patterning	Directly supports smaller nodes
Cost	Lower initial cost, but high process complexity	High initial cost, lower long-term complexity
Throughput	Slower due to multi-patterning	Faster due to lower dose
Yield	More defects due to multiple steps	Sensitive to resist quality, but fewer steps
Scalability	Struggles at <5nm	Suitable for advanced nodes (3nm, 2nm)